AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS)


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<anchor role="natural" id="p2001147c99820_2"></anchor><anchor role="natural" id="p2001147c99820_3"></anchor><emphasis role="bold">AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS)</emphasis>
<anchor role="natural" id="p2001147c99820_2"></anchor><anchor role="natural" id="p2001147c99820_3"></anchor><emphasis role="bold">AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS)</emphasis>by Luc G. Fréchette
<emphasis role="bold">INTRODUCTION</emphasis>
<emphasis role="bold">Trend toward Small Scales</emphasis>
Citation
Eugene A. Avallone; Theodore Baumeister III; Ali Sadegh: Marks’ Standard Handbook for Mechanical Engineers, Eleventh Edition. AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS), Chapter (McGraw-Hill Professional, 2007), AccessEngineering Export