INTRODUCTION


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INTRODUCTION
101030510308001011121INTRODUCTIONImprovement in performance and shrinkage of device sizes in microelectronics have been major driving forces for scientific and economic progress over the past 30 years. Developments in semiconductor processing and surface sciences have allowed precise control over critical dimensions with desirable properties for solid state devices. In the past 20 years, there have been tremendous developments in micro- and nanoelectromechanical systems (MEMS and NEMS), microfluidics and nanofluidics, quantum structures and devices, photoni…
Citation
Zhuomin M. Zhang: Nano / Microscale Heat Transfer. INTRODUCTION, Chapter (McGraw-Hill Professional, 2007), AccessEngineering Export