Metrology, Manufacturing Defects, and Defect Extraction


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Metrology, Manufacturing Defects, and Defect Extraction
Metrology, Manufacturing Defects, and Defect Extraction
<emphasis role="bold">Introduction</emphasis> Semiconductor manufacturing is a complex process that involves concepts from various science and engineering disciplines. Since its start during the late 1940s, semiconductor manufacturing has evolved into an industry whose reach has spread into every facet of life today. From space technology to handheld devices, the number of applications that use semiconductor-based components is constantly on the rise. Simply because the transistor shrinks in size every two years, its processing power enables comp…
Citation
Sandip Kundu; Aswin Sreedhar: Nanoscale CMOS VLSI Circuits: Design for Manufacturability. Metrology, Manufacturing Defects, and Defect Extraction, Chapter (McGraw-Hill Professional, 2010), AccessEngineering Export